Low frequency and microwave performances of Ba0.6Sr 0.4TiO3 films on atomic layer deposited TiO 2/high resistivity Si substrates

Journal of Electroceramics

Volumn 17, Issue 2-4, 2006, Pages 421-425

  Kim, Hyun Suk ^a   Kim, Il Doo ^b   Kim, Ki Byoung ^c   Yun, Tae Soon ^c   Lee, Jong Chul ^c   Tuller, Harry L ^d   Choi, Won Youl ^e   Kim, Ho Gi ^a  

^a Korea Advanced Institute of Science and Technology (KAIST)   (South Korea)

^b Korea Institute of Science and Technology   (South Korea)

^c Kwangwoon University   (South Korea)

^d Massachusetts Institute of Technology   (United States)

^e Gangneung Wonju National University   (South Korea)

Author keywords

BST; Buffer layer; Coplanar waveguide; Phase shifter

Indexed keywords

BARIUM COMPOUNDS; ELECTRIC CONDUCTIVITY; ELECTRIC FIELD EFFECTS; MICROWAVES; PHASE SHIFTERS; SUBSTRATES;

BUFFER LAYERS; MICROWAVE BUFFERS; SINGLE CRYSTAL SUBSTRATES;

THIN FILMS;

EID: 33847177692     PISSN: 13853449     EISSN: 15738663     Source Type: Journal    
DOI: 10.1007/s10832-006-9336-z     Document Type: Conference Paper

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