메뉴 건너뛰기




Volumn , Issue , 2003, Pages 100-102

RF MEMS switch for wireless LAN applications

Author keywords

Contacts; Electrodes; Gold; Low voltage; Microswitches; Radio frequency; Radiofrequency microelectromechanical systems; Structural beams; Switches; Wireless LAN

Indexed keywords

CANTILEVER BEAMS; CONTACTS (FLUID MECHANICS); ELECTRIC SWITCHES; ELECTRODES; ELECTROMECHANICAL DEVICES; GOLD; LOCAL AREA NETWORKS; MEMS; NANOCANTILEVERS; SWITCHES;

EID: 33847169830     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/ICMENS.2003.1221973     Document Type: Conference Paper
Times cited : (5)

References (6)
  • 1
    • 0031098105 scopus 로고    scopus 로고
    • Micromechanical switches fabricated using nickel surface micromachining
    • March
    • P.M. Zavracky, S. Majumder, and N.E. McGruer, "Micromechanical switches fabricated using nickel surface micromachining," Journal of Microelectromechanical System, Vol. 6, No. 1, pp. 3, March 1997.
    • (1997) Journal of Microelectromechanical System , vol.6 , Issue.1 , pp. 3
    • Zavracky, P.M.1    Majumder, S.2    McGruer, N.E.3
  • 3
    • 3943070464 scopus 로고    scopus 로고
    • Critical review: Adhesion in surface micromechanical structures
    • Jan.
    • R. Maboudian and R.T. Howe, "Critical review: Adhesion in surface micromechanical structures," J. Vac. Sci. Technol. B, 15(1), Jan. 1997.
    • (1997) J. Vac. Sci. Technol. B , vol.15 , Issue.1
    • Maboudian, R.1    Howe, R.T.2
  • 4
    • 0030676704 scopus 로고    scopus 로고
    • Comparative study of various release methods for polysilicon surface micromachining
    • J.Y. Kim and C.-J Kim, "Comparative study of various release methods for polysilicon surface micromachining," IEEE International conference on. MEMS, pp. 442, 1997.
    • (1997) IEEE International Conference on. MEMS , pp. 442
    • Kim, J.Y.1    Kim, C.-J.2


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.