Single-chip multiple-frequency RF microresonators based on aluminum nitride contour-mode and FBAR technologies

Proceedings - IEEE Ultrasonics Symposium

Volumn 2, Issue , 2005, Pages 1187-1190

  Piazza, G ^a   Stephanou, P J ^a   Black, J P ^a   White, R M ^a   Pisano, A P ^a  

^a UNIVERSITY OF CALIFORNIA   (United States)

Author keywords

Aluminum nitride; Contour mode resonators; FBAR; IF filters; MEMS oscillator; Micromechanical filters; Piezoelectric resonators

Indexed keywords

ACOUSTIC BULK WAVE DEVICES; ALUMINUM COMPOUNDS; MICROELECTROMECHANICAL DEVICES; NATURAL FREQUENCIES; OSCILLATORS (ELECTRONIC); PIEZOELECTRIC DEVICES;

CONTOUR-MODE RESONATORS; FILM BULK ACOUSTIC RESONATORS (FBAR); IF FILTERS; MEMS OSCILLATORS; MICROMECHANICAL FILTERS; PIEZOELECTRIC RESONATORS;

RESONATORS;

EID: 33847135607     PISSN: 10510117     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/ULTSYM.2005.1603063     Document Type: Conference Paper

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