FEA calculations for ultra thin piezoresistive pressure sensor on SOI for heatspreader integration

7th International Conference on Thermal, Mechanical and Multiphysics Simulation and Experiments in Micro-Electronics and Micro-Systems, EuroSimE 2006

Volumn 2006, Issue , 2006, Pages

  Bercu, Bogdan ^a   Montès, Laurent ^a   Morfouli, Panagiota ^a  

^a CNRS   (France)

Author keywords

[No Author keywords available]

Indexed keywords

COMPUTATIONAL GEOMETRY; COMPUTER SIMULATION; FINITE ELEMENT METHOD; MICROELECTRONICS; OPTIMIZATION; SILICON ON INSULATOR TECHNOLOGY;

ELECTRICAL EFFECTS; HEAT SPREADERS; MICROELECTRONIC APPLICATIONS; PIEZORESISTIVE PRESSURE SENSORS;

MICROSENSORS;

EID: 33847130620     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/ESIME.2006.1643958     Document Type: Conference Paper

References (11)

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