Investigation of nonlinear CMUT behavior

Proceedings - IEEE Ultrasonics Symposium

Volumn 1, Issue , 2005, Pages 585-588

  Lohfink, A ^a,b   Eccardt, P C ^a  

^a SIEMENS AG   (Germany)

^b UNIVERSITY OF BREMEN   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

CAPACITANCE; ELECTRIC EXCITATION; ELECTROSTATICS; MICROMACHINING; SIGNAL PROCESSING;

CAPACITIVE MICROMACHINED ULTRASOUND TRANSDUCERS (CMUT); ELECTROSTATIC EXCITATION; HIGH LEVEL SIGNALS; MEDICAL ULTRASONIC DIAGNOSTICS;

ULTRASONIC TRANSDUCERS;

EID: 33847111673     PISSN: 10510117     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/ULTSYM.2005.1602920     Document Type: Conference Paper

References (7)

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2. P.-C. Eccardt, K. Niederer, T. Scheiter, and C. Hierold, "Surface Micromachined Ultrasound Transducers in CMOS Technology," in Proceedings of the IEEE Ultrasonics Symposium, San Antonio, Texas, November 3-6, 1996.
3. P.-C. Eccardt, K. Niederer, and B. Fischer, "Micromachined Transducers for Ultrasonic Applications," in Proceedings of the IEEE Ultrasonics Symposium, Toronto, Canada, October 5-8, 1997.
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5. S. Zhou, P. Reynolds, and J. Hossack, "Pro-compensated Excitation Waveform to Suppress Second Harmonic Generation in MEMS Electrostatic Transducers," in Proceedings of the IEEE Ultrasonics Symposium, Honolulu, Hawaii, October 5-8, 2003.
6. R. Franke, HQP: a solver for sparse nonlinear optimization, Version 1.9.2. User's manual, http://hqp.sourceforge.net.
7. R. Franke and E. Arnold, "The solver Omuses/HQP for structured large-scale constrained optimization: algorithm, implementation, and example application," in Proceedings of the Sixth SIAM Conference on Optimization, Atlanta, 1999.