Defect behaviour in deuterated and non-deuterated n-type si

Solid State Phenomena

Volumn 108-109, Issue , 2005, Pages 553-560

  Bleka, J H ^a   Monakhov, E V ^a   Ulyashin, A ^a   Auret, F D ^b   Kuznetsov, A Yu ^a   Avset, B S ^c   Svensson, B G ^a  

^a UNIVERSITY OF OSLO   (Norway)

^b UNIVERSITY OF PRETORIA   (South Africa)

^c SINTEF ICT   (Norway)

Author keywords

Defects; Deuterium; DLTS; Hydrogen; Si

Indexed keywords

ANNEALING; DEEP LEVEL TRANSIENT SPECTROSCOPY; DEFECTS; HYDROGEN; OXYGEN; SEMICONDUCTOR DEVICE MANUFACTURE; SILICON; SILICON WAFERS;

DEUTERIUM PLASMA; DIODE DETECTORS; DIVACANCIES; DLTS SPECTRA; ELECTRICALLY ACTIVE DEFECTS; HIGH PURITY; INTERSTITIAL OXYGEN; OXYGEN CENTRES;

DEUTERIUM;

EID: 33847005310     PISSN: 10120394     EISSN: 16629779     Source Type: Book Series    
DOI: 10.4028/www.scientific.net/SSP.108-109.553     Document Type: Conference Paper

References (11)

1. S. D. Brotherton and P. Bradley: J. Appl. Phys. 53, 5720 (1982)
2. L. W. Song, X. D. Zhan, B. W. Benson and G. D. Watkins: Phys. Rev. B 42, 5765 (1990)
3. N. Keskitalo, A. Hallen, J. Lalita and B. G. Svensson: Defects and Diffusion in Silicon Processing, edited by T. Diaz de la Rubia, S. Coffa, P. A. Stolk and C. S. Rafferty, Mater. Res. Soc. Symp. Proc. No. 469 (Materials Research Society, Pittsburg, 1997), p. 233
4. A. O. Evwaraye and E. Sun: J. Appl. Phys. 47, 3776 (1976)
5. L. C. Kimerling: Radiation Effects in Semiconductors 1976, edited by N. B. Urli and J. W. Corbett (Inst. Phys., Bristol, 1977), p. 221
6. B. G. Svensson and M. Willander: J. Appl. Phys. 62, 2758 (1987)
7. E. V. Monakhov, A. Ulyashin, G. Alfieri, A. Yu. Kuznetsov, B. S. Avset and B. G. Svensson: Phys. Rev. B 69, 153202 (2004)
8. J. Coutinho, V. J. B. Torres, R. Jones, S. Oberg and P. R. Briddon: J. Phys.: Condens. Matter 15, S2809 (2003)
9. B. G. Svensson, K.-H. Ryden and B. M. S. Lewerentz: J. Appl. Phys. 66, 1699 (1989)
10. E. V. Monakhov, B. S. Avset, A. Hallen and B. G. Svensson: Phys. Rev. B 65, 233207 (2002)
11. G. Alfieri, E. V. Monakhov, B. S. Avset and B. G. Svensson: Phys. Rev. B 68, 233202 (2003)