Reduction of traps and improvement of carrier lifetime in 4H-SiC epilayers by ion implantation

Applied Physics Letters

Volumn 90, Issue 6, 2007, Pages

  Storasta, Liutauras ^a   Tsuchida, Hidekazu ^a  

^a CENTRAL RESEARCH INSTITUTE OF ELECTRIC POWER INDUSTRY   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

CARRIER MOBILITY; DEFECTS; ELECTRON TRAPS; RAPID THERMAL ANNEALING; REDUCTION; SILICON CARBIDE;

CARBON INTERSTITIALS; IMPLANTED LAYERS; MINORITY CARRIERS; SILICON ION IMPLANTATION;

ION IMPLANTATION;

EID: 33846987871     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.2472530     Document Type: Article

References (12)

1. J. R. Jenny, D. P. Malta, V. F. Tsvetkov, M. K. Das, H. M. Hobgood, J. C. H. Carter, R. J. Kumar, J. M. Borrego, R. J. Gutmann, and R. Aavikko, J. Appl. Phys. 100, 113710 (2006).
2. J. Zhang, L. Storasta, J. P. Bergman, N. T. Son, and E. Janźn, J. Appl. Phys. 93, 4708 (2003).
3. T. Kimoto, A. Itoh, H. Matsunami, S. Sridhara, L. L. Clemen, R. P. Devaty, W. J. Choyke, T. Dalibor, C. Peppermuller, and G. Pensl, Inst. Phys. Conf. Ser. 142, 393 (1996).
4. T. Tawara, H. Tsuchida, S. Izumi, I. Kamata, and T. Izumi, Mater. Sci. Forum 457-460, 457 (2004).
5. P. B. Klein, B. V. Shanabrook, S. W. Huh, A. Y. Polyakov, M. Skowronski, J. J. Sumakeris, and M. J. O'Loughlin, Appl. Phys. Lett. 88, 052110 (2006).
6. L. Storasta, J. P. Bergman, E. Janźn, A. Henry, and J. Lu, J. Appl. Phys. 96, 4909 (2004).
7. S. G. Sridhara, R. P. Devaty, and W. J. Choyke, J. Appl. Phys. 84, 2963 (1998).
8. M. Bockstedte, A. Mattausch, and O. Pankratov, Phys. Rev. B 69, 235202 (2004).
9. T. Kimoto, S. Nakazawa, K. Hashimoto, and H. Matsunami, Appl. Phys. Lett. 79, 2761 (2001).
10. C. W. Litton, D. Johnstone, S. Akarca-Biyikli, K. S. Ramaiah, I. Bhat, T. P. Chow, J. K. Kim, and E. F. Schubert, Appl. Phys. Lett. 88, 121914 (2006).
11. N. Y. Garces, W. E. Carlos, E. R. Glaser, S. W. Huh, H. J. Chung, S. Nigam, A. Y. Polyakov, and M. Skowronski, Mater. Sci. Forum 527-529, 547 (2006).
12. L. Torpo, S. Pöykkö, and R. M. Nieminen, Phys. Rev. B 57, 6243 (1998).