Effects of doping on structural change and hydrogen bonding in laser crystallized polycrystalline silicon films

Thin Solid Films

Volumn 515, Issue 7-8, 2007, Pages 3847-3853

  Saleh, R ^a   Nickel, N H ^b  

^a UNIVERSITY OF INDONESIA   (Indonesia)

^b HAHN MEITNER INSTITUT   (Germany)

Author keywords

Doped polycrystalline silicon; Hydrogen bonding; Hydrogen density of states; Hydrogen effusion; Laser crystallization; Raman spectroscopy

Indexed keywords

BACKSCATTERING; CRYSTALLIZATION; DOPING (ADDITIVES); HYDROGEN BONDS; LASER APPLICATIONS; RAMAN SPECTROSCOPY; THIN FILMS;

DOPED POLYCRYSTALLINE SILICON; HYDROGEN DENSITY-OF-STATES; HYDROGEN EFFUSION; LASER CRYSTALLIZATION; SILICON FILMS;

POLYSILICON;

EID: 33846979130     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.tsf.2006.10.105     Document Type: Article

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