Wet chemical etching of ZnO film using aqueous acidic salt

Thin Solid Films

Volumn 515, Issue 7-8, 2007, Pages 3967-3970

  Zheng, H ^a   Du, X L ^a   Luo, Q ^a   Jia, J F ^a   Gu, C Z ^a   Xue, Q K ^a  

^a INSTITUTE OF PHYSICS   (China)

Author keywords

Depth profiling; Etching; X ray photoelectron spectroscopy; Zinc oxide

Indexed keywords

ETCHING; IRON COMPOUNDS; MORPHOLOGY; SINGLE CRYSTALS; X RAY PHOTOELECTRON SPECTROSCOPY; ZINC OXIDE;

ACIDIC SALTS; DEPTH PROFILING; HYDROMECHANICAL PARAMETERS;

THIN FILMS;

EID: 33846929195     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.tsf.2006.09.017     Document Type: Article

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