A quantitative and comparative study of sputtering yields in Au

Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms

Volumn 239, Issue 4, 2005, Pages 331-346

  Samela, J ^a   Kotakoski, J ^a   Nordlund, K ^a   Keinonen, J ^a  

^a UNIVERSITY OF HELSINKI   (Finland)

Author keywords

Collision cascade; Cratering; Heat spikes; Interatomic potential; Ion irradiation; Molecular dynamics; Sputtering

Indexed keywords

CHEMICAL ANALYSIS; COMPUTER SIMULATION; MOLECULAR DYNAMICS; SPUTTERING; STATISTICAL METHODS;

COLLISION CASCADES; CRATERING; HEAT SPIKES; INTERATOMIC POTENTIALS; ION IRRADIATION;

GOLD;

EID: 25844469028     PISSN: 0168583X     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.nimb.2005.05.047     Document Type: Article

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