Characterization of 3D-stc detectors fabricated at ITC-irst

Nuclear Instruments and Methods in Physics Research, Section A: Accelerators, Spectrometers, Detectors and Associated Equipment

Volumn 572, Issue 1 SPEC. ISS., 2007, Pages 284-286

  Boscardin, Maurizio ^a   Bosisio, Luciano ^b   Bruzzi, Mara ^c   Dalla Betta, Gian Franco ^d   Piemonte, Claudio ^a   Pozza, Alberto ^a   Ronchin, Sabina ^a   Tosi, Carlo ^c   Zorzi, Nicola ^a  

^a ITC IRST   (Italy)

^b UNIVERSITY OF TRIESTE   (Italy)

^c UNIVERSITY OF FLORENCE   (Italy)

^d UNIVERSITY OF TRENTO   (Italy)

Author keywords

3D detectors; Charge collection efficiency; DRIE; Electrical characterization; Fabrication technology

Indexed keywords

CHARGED PARTICLES; DIODES; ELECTRODES; FABRICATION;

CHARGE COLLECTION; CHARGE COLLECTION EFFICIENCY; COLUMNAR ELECTRODES; ELECTRICAL CHARACTERIZATION; FABRICATION TECHNOLOGY; RADIATION TOLERANCE;

PARTICLE DETECTORS;

EID: 33846905970     PISSN: 01689002     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.nima.2006.10.367     Document Type: Article

References (7)

1. Kok A., et al. Nucl. Instr. and Meth. A 560 (2006) 127
2. Parker S., et al. Nucl. Instr. and Meth. A 395 (1997) 328
3. Piemonte C., et al. Nucl. Instr. and Meth. A 541 (2005) 441
4. S. Ronchin, et al., Fabrication of 3D detectors with columnar electrodes of the same doping type, Nucl. Instr. and Meth. A., in press, doi:10.1016/jnima.2006.10.388.
5. A. Pozza, et al., First electrical characterization of 3D detectors with electrodes of the same doping type, Nucl. Instr. and Meth. A., in press, doi:10.1016/jnima.2006.09.032.
6. S. Eränen, et al., Silicon semi 3D radiation detectors, IEEE NSS, Conference Record, Paper N28-3, Rome (Italy), 2004.
7. Kenney C., et al. IEEE Trans. Nucl. Sci. NS-46 4 (1999) 1224