Study on the growth and superhardness of TiN/SiO2 nanomultilayers

Wuli Xuebao/Acta Physica Sinica

Volumn 54, Issue 4, 2005, Pages 1742-1748

  Wei, Lun ^a   Mei, Fang Hua ^a   Shao, Nan ^a   Li, Ge Yang ^a   Li, Jian Guo ^a  

^a SHANGHAI JIAO TONG UNIVERSITY   (China)

Author keywords

Epitaxial growth; Forced crystallization of amorphous; Superhardness; TiN SiO2 nanomultilayers

Indexed keywords

EID: 17944369884     PISSN: 10003290     EISSN: None     Source Type: Journal    
DOI: None     Document Type: Article

References (27)