Planarization for three-dimensional photonic crystals and other multi-level nanoscale structures

Nanotechnology

Volumn 18, Issue 3, 2007, Pages

  Subramania, G ^a  

^a SANDIA NATIONAL LABORATORIES   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

CHEMICAL MECHANICAL POLISHING; CRYSTALLINE MATERIALS; PHOTONS; SILICA; THREE DIMENSIONAL; TRENCHING;

'PRE-FILL-IN' TECHNIQUE; PLANARIZATION; THREE-DIMENSIONAL PHOTONIC CRYSTALS; WOODPILE PHOTONIC LATTICE;

NANOSTRUCTURED MATERIALS;

EID: 33846807710     PISSN: 09574484     EISSN: 13616528     Source Type: Journal    
DOI: 10.1088/0957-4484/18/3/035303     Document Type: Article

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