Thermal simulation of UV laser ablation of polyimide

Microelectronics Reliability

Volumn 47, Issue 2-3, 2007, Pages 347-353

  Gordon, Péter ^a   Balogh, Bálint ^a   Sinkovics, Bálint ^a  

^a BUDAPEST UNIVERSITY OF TECHNOLOGY AND ECONOMICS   (Hungary)

Author keywords

[No Author keywords available]

Indexed keywords

COMPUTER SIMULATION; COPPER COMPOUNDS; LASER ABLATION; LASER BEAM EFFECTS; NATURAL FREQUENCIES; TEMPERATURE DISTRIBUTION;

PULSE REPETITION FREQUENCY; SIMULATION SOFTWARE; THERMAL SIMULATION; UV LASER ABLATION;

POLYIMIDES;

EID: 33846584126     PISSN: 00262714     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.microrel.2006.01.013     Document Type: Article

References (14)

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