Gold-plated micromachined millimeter-wave resonators based on rectangular coaxial transmission lines

IEEE Transactions on Microwave Theory and Techniques

Volumn 55, Issue 1, 2007, Pages 78-84

  Marsh, Eric D ^a,b   Reid, James Robert ^a,b   Vasilyev, Vladimir S ^c  

^a IEEE   (United States)

^b AIR FORCE RESEARCH LABORATORY   (United States)

^c S4 Inc   (United States)

Author keywords

Micromachining; Millimeter wave resonators; Q factor; Transmission line resonators

Indexed keywords

ELECTROLESS PROCESSES; MILLIMETER-WAVE RESONATORS; TRANSMISSION LINE RESONATORS;

ELECTRIC LINES; ELECTROLESS PLATING; MICROMACHINING; MICROWAVES; Q FACTOR MEASUREMENT; RESONATORS;

MILLIMETER WAVE DEVICES;

EID: 33846577827     PISSN: 00189480     EISSN: None     Source Type: Journal    
DOI: 10.1109/TMTT.2006.888947     Document Type: Article

References (12)

1. J. Reid, E. Marsh, and R. Webster, "Micromachined rectangular coaxial transmission lines," IEEE Trans. Microw. Theory Tech., vol. 54, no. 8, pp. 3433-3442, Aug. 2006.
2. E. Brown, A. Cohen, C. Bang, M. Lockard, G. Byrne, N. Vendelli, D. McPherson, and G. Zhang, "Characteristics of microfabricated rectangular coax in the Ka band," Microw, Opt. Technol. Lett., vol. 40, pp. 365-804, Mar. 2004.
3. J.-B. Yoon, B.-I. Kim, Y.-S. Choi, and E. Yoon, "3-D construction of monolithic passive components for RF and microwave ICs using thick-metal surface micromachining technology," IEEE Trans. Microw. Theory Tech., vol. 51, no. 1, pp. 279-288, Jan. 2003.
4. I. L. Garro, M. Lancaster, and P. Hall, "Air-filled square coaxial transmission line and its use in microwave filters," Proc. Inst. Elect. Eng. -Microw., Antennas, Propag., vol. 152, no. 3, pp. 155-159, Jun. 2005.
5. D. Filipovic, Z. P. K. Vanhille, M. Lukic, S. Rondineau, M. Buck, G. Potvin, D. Fontaine, C. Nichols, D. Sherrer, S. Zhou, W. Houck, D. Fleming, E. Daniel, W. Wilkins, V. Sokolov, and J. Evans, "Modeling, design, fabrication, and performance of rectangular μ-coaxial lines and components," in IEEE MTT-S Int. Microw. Symp. Dig., Jun. 2006, pp. 1393-1396.
6. T.-S. Chen, "Determination of the capacitance, inductance, and characteristic impedance of rectangular lines," IRE Trans. Microw. Theory Tech., vol. MTT-9, no. 9, pp. 510-519, Sep. 1960.
7. D. Pozar, Microwave Engineering. Reading. MA: Addison-Wesley, 1990.
8. T.Edwards, Foundations for Microstrip Circuit Design, 2nd ed. New York: Wiley, 1992.
9. Ansoft High Frequency Structure Simulator, ver. 9.0. Ansoft Corporation, Pittsburgh, PA, 2004. [Online]. Available: www.ansoft.com
10. A. Cohen, G. Zhang, F. Tseng, F. Mansfield, U. Frodis, and P. Will, "EFAB: Rapid low-cost desktop micromachining of high aspect ratio true 3-D MEMS," in IEEE Int. MEMS Conf., Jan. 1999, pp. 244-251.
11. L. Chua and D. Mirshekar-Syahkal, "Accurate and direct characterization of high-Q microwave resonators using one-port measurement," IEEE Trans. Microw. Theory Tech., vol. 51, no. 3, pp. 978-985, Mar. 2003.
12. P. Weng, L. Chua, and D. Mirshekar-Syahkal, "Accurate characterization of low-Q microwave resonator using critical-points method," IEEE Trans. Microw. Theory Tech., vol. 53, no. 1, pp. 349-353, Jan. 2005.