An alleviated self-heating poly-Si thin-film transistor built on noncontinuing buried insulator

Electrochemical and Solid-State Letters

Volumn 10, Issue 3, 2007, Pages

  Lin, Jyi Tsong ^a   Huang, Kuo Dong ^a,b   Wu, Chu Lun ^a  

^a NATIONAL SUN YAT SEN UNIVERSITY   (Taiwan)

^b ELECTROCHEMICAL SOCIETY   (Taiwan)

Author keywords

[No Author keywords available]

Indexed keywords

NONCONTINUING BURIED INSULATOR; SEALED-INTERFACE LOCAL OXIDATION (SILO); SELF-HEATING EFFECT;

ELECTRIC INSULATORS; HEATING; IMPACT IONIZATION; OXIDATION; POLYSILICON; SILICON ON INSULATOR TECHNOLOGY;

THIN FILM TRANSISTORS;

EID: 33846572409     PISSN: 10990062     EISSN: None     Source Type: Journal    
DOI: 10.1149/1.2428750     Document Type: Article

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