Fast dual graph based hotspot detection

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 6349 II, Issue , 2006, Pages

  Kahng, Andrew B ^a,b,c   Park, Chul Hong ^a   Xu, ^b,c  

^a UNIVERSITY OF CALIFORNIA   (United States)

^b UNIVERSITY OF CALIFORNIA   (United States)

^c Blaze DfM   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

HOTSPOT DETECTION; MASS PRODUCTION; PARAMETRIC YIELD; PATTERNING FIDELITY;

COMPUTER SIMULATION; ERROR ANALYSIS; GRAPH THEORY; IMAGE ANALYSIS; OPTICAL VARIABLES CONTROL; PARAMETER ESTIMATION;

PHOTOLITHOGRAPHY;

EID: 33846570490     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.692949     Document Type: Conference Paper

References (7)

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