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Volumn 2005, Issue , 2005, Pages 438-440

High performance poly-Si thin film transistor (μeff ∼ 258cm2/Vs) fabricated on plastic substrates below 170°C

Author keywords

[No Author keywords available]

Indexed keywords

ELECTRON MOBILITY; FABRICATION; INDUCTIVELY COUPLED PLASMA; SEMICONDUCTING SILICON; SPUTTER DEPOSITION; SUBSTRATES;

EID: 33846567958     PISSN: 10831312     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper
Times cited : (1)

References (5)


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.