A fabrication technology for multi-layer polymer-based microsystems with integrated fluidic and electrical functionality

Sensors and Actuators, B: Chemical

Volumn 121, Issue 2, 2007, Pages 689-697

  Moss, Eileen D ^a   Han, Arum ^b   Frazier, A Bruno ^a  

^a GEORGIA INSTITUTE OF TECHNOLOGY   (United States)

^b Texas AandM University   (United States)

Author keywords

Heat staking; Laser ablation; Microfludics; Microstenciling; Multi layer; Polyimide

Indexed keywords

BIOCOMPATIBILITY; CARBON DIOXIDE; ELECTRICITY; LASER ABLATION; MULTILAYERS; POLYIMIDES;

HEAT STAKING; MICROFLUDICS; MICROSTENCILING;

FLUIDICS;

EID: 33846560667     PISSN: 09254005     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.snb.2006.03.036     Document Type: Article

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