A multi-layer technology for biocompatible polymer microsystems with integrated fluid and electrical functionality

Materials Research Society Symposium Proceedings

Volumn 820, Issue , 2004, Pages 215-220

  Moss, Eileen D ^a   Han, Arum ^a   Frazier, A Bruno ^a  

^a GEORGIA INSTITUTE OF TECHNOLOGY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ACOUSTIC IMPEDANCE; BIOCOMPATIBILITY; INTERFACES (MATERIALS); LASER ABLATION; MICROELECTROMECHANICAL DEVICES; MULTILAYERS; REACTIVE ION ETCHING;

INTEGRATED FLUIDS; MICROCHANNELS; MICROSTENCILING; MICROSYSTEMS;

POLYMERS;

EID: 14944375720     PISSN: 02729172     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1557/proc-820-o8.13     Document Type: Conference Paper

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