Ohmic contact mechanism of Ni/Au contact to p-type GaN studied by Rutherford backscattering spectrometry

Journal of Crystal Growth

Volumn 298, Issue SPEC. ISS, 2007, Pages 808-810

  Hu, C Y ^a   Ding, Z B ^a   Qin, Z X ^a   Chen, Z Z ^a   Xu, K ^a   Yang, Z J ^a   Shen, B ^a   Yao, S D ^a   Zhang, G Y ^a  

^a PEKING UNIVERSITY   (China)

Author keywords

A3. Metalorganic chemical vapor deposition; B1. Gallium compounds; B1. Metals; B1. Nitrides; B2. Semiconducting III V materials

Indexed keywords

ANNEALING; DIFFUSION; ELECTRIC RESISTANCE; GALLIUM NITRIDE; METALLORGANIC CHEMICAL VAPOR DEPOSITION; NICKEL; OXIDATION; RUTHERFORD BACKSCATTERING SPECTROSCOPY;

ANNEALING TIME; CONTACT RESISTANCE; GAN;

OHMIC CONTACTS;

EID: 33846431623     PISSN: 00220248     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.jcrysgro.2006.10.100     Document Type: Article

References (16)

1. Yu E.T., and Manasreh M.O. III-V nitride semiconductors: applications and devices (2003), Taylor and Francis, New York
2. Ho J.K., Jong C.S., Chiu C.C., Huang C.N., Shih K.K., Chen L.C., Chen F.R., and Kai J.J. J. Appl. Phys. 86 (1999) 4491
3. Ho J.K., Jong C.S., Chiu C.C., Huang C.N., Chen C.Y., and Shih K.K. Appl. Phys. Lett. 74 (1999) 1275
4. Koide Y., Maeda T., Kawakami T., Fujita S., Uemura T., Shibata N., and Murakami M. J. Electron. Mater. 28 (1999) 341
5. Qiao D., Yu L.S., Lau S.S., Lin J.Y., Jiang H.X., and Haynes T.E. J. Appl. Phys. 88 (2000) 4196
6. Wang S.H., Mohney S.E., and Birkhahn R. J. Appl. Phys. 91 (2003) 3711
7. Qin Z.X., Chen Z.Z., Zhang H.X., Ding X.M., Hu X.D., Yu T.J., and Zhang G.Y. Solid-State Electron. 47 (2003) 1741
8. Chen L.C., Chen F.R., Kai J.J., Chang L., Ho J.K., Jong C.S., Chiu C.C., Huang C.N., Chen C.Y., and Shih K.K. J. Appl. Phys. 86 (1999) 3826
9. Chen L.C., Ho J.K., Chen F.R., Kai J.J., Chang L., Jong C.S., Chiu C.C., Huang C.N., and Shih K.K. Phys. Stat. Sol. (a) 176 (1999) 773
10. Davydov A.V., Bendersky L.A., and Boettinger W.J. Appl. Surf. Sci. 223 (2004) 24
11. Omiya H., Ponce F.A., Marui H., Tanaka S., and Mukai T. Appl. Phys. Lett. 85 (2004) 6143
12. Wei-kan C., Mayer James W., and Marc-A N. Backscattering Spectrometry (1978), Academic Press, New York p. 12
13. Stareev G. Appl. Phys. Lett. 62 (1993) 2801
14. Hu C.Y., Qin Z.X., Feng Z.X., Chen Z.Z., Yang Z.J., Yu T.J., Hu X.D., Yao S.D., and Zhang G.Y. Mater. Sci. Eng. B 128 (2005) 37
15. Berger H.H. Solid-State Electron. 15 (1972) 145
16. Doolitle L.T. Nucl. Instrum. Methods B 9 (1985) 344