Fabrication of diamond-like carbon nanosprings by focused-ion-beam chemical vapor deposition and evaluation of their mechanical characteristics

IEICE Transactions on Electronics

Volumn E90-C, Issue 1, 2007, Pages 41-44

  Nakamatsu, Kenichiro ^a,b,c,d   Nagase, Masao ^e   Ichihashi, Toshinari ^f   Kanda, Kazuhiro ^a   Haruyama, Yuichi ^a   Kaito, Takashi ^g   Matsui, Shinji ^a,b  

^a UNIVERSITY OF HYOGO   (Japan)

^b JAPAN SCIENCE AND TECHNOLOGY AGENCY   (Japan)

^c JSPS   (Japan)

^d JAPAN SOCIETY FOR THE PROMOTION OF SCIENCE   (Japan)

^e Bio Medical Informatics Research Center   (Japan)

^f NEC CORPORATION   (Japan)

^g SII NANOTECHNOLOGY INC   (Japan)

Author keywords

Chemical vapor deposition; Diamond like carbon; Focused ion beam; Mechanical characteristics; Nanospring

Indexed keywords

CHEMICAL VAPOR DEPOSITION; ELASTIC MODULI; ION BEAMS; NANOSTRUCTURED MATERIALS; OPTICAL MICROSCOPY;

DIAMOND-LIKE CARBON; FOCUSED ION BEAMS; MECHANICAL CHARACTERISTICS; NANOSPRING;

DIAMOND LIKE CARBON FILMS;

EID: 33846404964     PISSN: 09168524     EISSN: 17451353     Source Type: Journal    
DOI: 10.1093/ietele/e90-c.1.41     Document Type: Conference Paper

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