High-performance condenser microphone with single-crystalline silicon diaphragm and backplate

IEEE Sensors Journal

Volumn 7, Issue 1, 2007, Pages 4-9

  Goto, Masahide ^b   Iguchi, Yoshinori ^b   Ono, Kazuho ^b   Ando, Akio ^a,b   Takeshi, Futoshi ^c   Matsunaga, Susumu ^c   Yasuno, Yoshinobu ^c   Tanioka, Kenkichi ^b   Tajima, Toshifumi ^b  

^a IEEE   (Japan)

^b NHK SCIENCE AND TECHNICAL RESEARCH LABORATORIES   (Japan)

^c Panasonic SC Device Solutions Company Ltd   (Japan)

Author keywords

Acoustic transducers; Fabrication; Microelectromechanical systems (MEMS); Microphones; Modeling; Silicon

Indexed keywords

FREQUENCY RANGE; SILICON DIAPHRAGM; SINGLE-CRYSTALLINE SILICON;

ACOUSTIC TRANSDUCERS; CAPACITORS; MATHEMATICAL MODELS; MICROELECTROMECHANICAL DEVICES; PHOTOLITHOGRAPHY; SILICON; SINGLE CRYSTALS;

MICROPHONES;

EID: 33846317743     PISSN: 1530437X     EISSN: None     Source Type: Journal    
DOI: 10.1109/JSEN.2006.886869     Document Type: Article

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