Development of high-performance single-crystalline silicon condenser microphone

Proceedings of IEEE Sensors

Volumn 2005, Issue , 2005, Pages 772-775

  Goto, Masahide ^a   Tajima, Toshifumi ^a   Iguchi, Yoshinori ^a   Ono, Kazuho ^a   Ando, Akio ^a   Tanioka, Kenkichi ^a   Takeshi, Futoshi ^b   Matsunaga, Susumu ^b   Yasuno, Yoshinobu ^b  

^a NHK SCIENCE AND TECHNICAL RESEARCH LABORATORIES   (Japan)

^b Panasonic SC Device Solutions Company Ltd   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

CAPACITORS; CRYSTALLINE MATERIALS; FREQUENCY RESPONSE; NATURAL FREQUENCIES; PHOTOLITHOGRAPHY; SILICON;

ACOUSTICAL CHARACTERISTICS; CONDENSER MICROPHONES; DYNAMIC RANGES; SINGLE CRYSTALLINE SILICON;

MICROPHONES;

EID: 33846297073     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/ICSENS.2005.1597814     Document Type: Conference Paper

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