메뉴 건너뛰기




Volumn 2005, Issue , 2005, Pages

Thermal fatigue failure analysis of copper interconnects under alternating currents

Author keywords

[No Author keywords available]

Indexed keywords

COPPER; ELECTRIC CURRENTS; FAILURE ANALYSIS; FATIGUE OF MATERIALS; THERMAL LOAD; THERMOANALYSIS; TRANSMISSION ELECTRON MICROSCOPY;

EID: 33846295152     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/ICEPT.2005.1564621     Document Type: Conference Paper
Times cited : (8)

References (15)
  • 1
    • 0024766321 scopus 로고
    • Mechanical Properties of Thin Films
    • Nix WD. "Mechanical Properties of Thin Films", Metall. Trans. A, 1989; 20: 2217-2145.
    • (1989) Metall. Trans. A , vol.20 , pp. 2217-2145
    • Nix, W.D.1
  • 2
    • 0032500424 scopus 로고    scopus 로고
    • Size effects in materials due to microstructural and dimensional constraints: A comparative review
    • Arzt E. "Size effects in materials due to microstructural and dimensional constraints: a comparative review", Acta Mater., 1998; 46: 5611-5626.
    • (1998) Acta Mater , vol.46 , pp. 5611-5626
    • Arzt, E.1
  • 3
    • 0033360775 scopus 로고    scopus 로고
    • High cycle fatigue of thin silver films investigated by dynamic microbeam deflection
    • Schwaiger R, Kraft O. "High cycle fatigue of thin silver films investigated by dynamic microbeam deflection", Scripta Mater., 1999; 41: 823-829.
    • (1999) Scripta Mater , vol.41 , pp. 823-829
    • Schwaiger, R.1    Kraft, O.2
  • 4
  • 6
    • 0037425467 scopus 로고    scopus 로고
    • Size effects in the fatigue behavior of thin Ag films
    • Schwaiger R, Kraft O. "Size effects in the fatigue behavior of thin Ag films", Acta Mater. 2003; 51: 195-206.
    • (2003) Acta Mater , vol.51 , pp. 195-206
    • Schwaiger, R.1    Kraft, O.2
  • 7
    • 0242366180 scopus 로고    scopus 로고
    • Cyclic deformation of polycrystalline Cufilms
    • Schwaiger R. Dehm G. and Kraft O. "Cyclic deformation of polycrystalline Cufilms", Phil. Mag. 2003; 83: 693-710.
    • (2003) Phil. Mag , vol.83 , pp. 693-710
    • Schwaiger, R.1    Dehm, G.2    Kraft, O.3
  • 8
    • 0242302695 scopus 로고    scopus 로고
    • Effect of film thickness and grain size on fatigue-induced dislocation structures in Cu thin films
    • Zhang GP, Schwaiger R, Volkert CA, Kraft O. "Effect of film thickness and grain size on fatigue-induced dislocation structures in Cu thin films". Phil. Mag. Lett. 2003; 83: 477-483.
    • (2003) Phil. Mag. Lett , vol.83 , pp. 477-483
    • Zhang, G.P.1    Schwaiger, R.2    Volkert, C.A.3    Kraft, O.4
  • 9
  • 10
    • 10844289008 scopus 로고    scopus 로고
    • Thermal fatigue testing of thin metal films
    • Moenig R, Keller RR, Volkert CA. "Thermal fatigue testing of thin metal films", Rev. Sci. Instrum., 2004; 75: 4997-5004.
    • (2004) Rev. Sci. Instrum , vol.75 , pp. 4997-5004
    • Moenig, R.1    Keller, R.R.2    Volkert, C.A.3
  • 11
    • 19644371997 scopus 로고    scopus 로고
    • Thermal Fatigue of Cu Thin Films
    • Ph.D. Thesis, Universität Stuttgart, Germany
    • Moenig R. "Thermal Fatigue of Cu Thin Films", Ph.D. Thesis, Universität Stuttgart, Germany, 2004; http://elib.uni- stuttgart.de/opus/volltexte/2005/2173.
    • (2004)
    • Moenig, R.1
  • 12
  • 13
    • 0020006688 scopus 로고    scopus 로고
    • On creep fracture by void growth
    • 27
    • Cocks ACF, Ashby MF. "On creep fracture by void growth", Prog. Mater. Sci. Vol. 1982; 27(3-4): 189-244.
    • Prog. Mater. Sci , vol.1982 , Issue.3-4 , pp. 189-244
    • Cocks, A.C.F.1    Ashby, M.F.2
  • 14
    • 0032684355 scopus 로고    scopus 로고
    • Crack-like grain-boundary diffusion wedges in thin metal films
    • Gao H, Zhang L, Nix WD, Thompson CV, Arzt E, "Crack-like grain-boundary diffusion wedges in thin metal films". Acta Mater. 1999, 47: 2865-2878.
    • (1999) Acta Mater , vol.47 , pp. 2865-2878
    • Gao, H.1    Zhang, L.2    Nix, W.D.3    Thompson, C.V.4    Arzt, E.5
  • 15
    • 0042130340 scopus 로고    scopus 로고
    • Parallel glide: Unexpected dislocation motion parallel to the substrate in ultrathin copper films
    • Balk TJ, Dehm G, Arzt E. "Parallel glide: unexpected dislocation motion parallel to the substrate in ultrathin copper films". Acta Mater. 2003; 51: 4471.
    • (2003) Acta Mater , vol.51 , pp. 4471
    • Balk, T.J.1    Dehm, G.2    Arzt, E.3


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.