A diamond-like carbon film as a self-alignment layer for LCDs

Diamond and Related Materials

Volumn 16, Issue 2, 2007, Pages 296-301

  Kato, Yoshimine ^a   Kamiya, Hiroyuki ^a   Saitoh, Yukito ^a  

^a IBM JAPAN LTD   (Japan)

Author keywords

Diamond like carbon; Electrochemical properties; Optical properties; Plasma sputtering; Sputtering

Indexed keywords

ANISOTROPY; ELECTROCHEMISTRY; HYDROGEN; IRRADIATION; LIQUID CRYSTAL DISPLAYS; MAGNETRON SPUTTERING; OPTICAL PROPERTIES; ULTRAVIOLET RADIATION;

ANISOTROPIC STRUCTURE; ATOMIC BEAM BOMBARDMENT; ELECTROCHEMICAL PROPERTIES; PLASMA SPUTTERING;

DIAMOND LIKE CARBON FILMS;

EID: 33846284580     PISSN: 09259635     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.diamond.2006.06.019     Document Type: Article

References (18)

1. Toko Y., Sugiyama T., Katoh K., Iimura Y., and Kobayashi S. J. Appl. Phys. 74 (1993) 2071
2. Hasegawa M., and Taira Y.J. Photogr. Sci. Tech. 8 (1995) 241
3. Conference Record of the 1994 International Display Research Conference and International Workshops on Active Matrix LCDs and Display Materials (1994) 213
4. Chaudhari P., Lacey J., Lien A., and Speidell J. Jpn. J. Appl. Phys. 37 (1998) L55
5. Chaudhari P., Lacey J., Doyle J., Galligan E., Lien S., Callegari A., Hougham G., Lang N., Andry P., John R., Yang K., Lu M., Cai C., Speidell J., Purushothaman S., Ritsko J., Samant M., Stohr J., Nakagawa Y., Katoh Y., Saitoh Y., Sakai K., Satoh H., Odahara S., Nakano H., Nakagaki J., and Shiota Y. Nature 411 (2001) 56
6. Nakagawa Y., Kato Y., Saitoh Y., Sakai K., Satoh H., Wako K., Odahara S., Nakamura N., Nakagaki J., Nakano H., Chaudhari P., Lacey J., Doyle J., Galligan E., Lien S., Callegari A., Hougham G., Andry P., John R., Lu M., Cai C., Speidell J., Purushothaman S., Ritsko J., Samant M., and Stohr J. SID '01 Dig. (2001) 1346
7. Kato Y., Nakagawa Y., Saitoh Y., Satoh H., Odahara S., Hasegawa M., Chaudhari P., Doyle J., Lien S., Callegari A., Ritsko J., Samant M., and Stohr J. Proceedings of the 22nd International Display Research Conference: Euro Display '02 (2002) 525
8. Doyle J.P., Chaudhari P., Lacey J.L., Galligan E.A., Lien S.C., Callegari A.C., Lang N.D., Lu M., Nakagawa Y., Nakano H., Okazaki N., Odahara S., Katoh Y., Saitoh Y., Sakai K., Satoh H., and Shiota Y. Nucl. Instrum. Methods Phys. Res., B Beam Interact. Mater. Atoms 206 (2003) 467
9. Yaroshchuk O., Kravchuk, Dobrovolskyy A., Qiu L., and Lavrentovich O.D. Liq. Cryst. 31 (2004) 859
10. Janning J.L. Appl. Phys. Lett. 21 (1972) 173
11. Armitage D. J. Appl. Phys. 51 (1980) 2552
12. Kato Y., and Kamiya H. Proc. of the 23th Int. Display Research Conf. (2003) 188
13. Saitoh Y., and Lien A. Jpn. J. Appl. Phys. 39 (2000) 1743
14. Cho N., Krishnan K., Veirs D., Rubin M., Hopper C., Bhushan B., and Bogy D. J. Mater. Res. 5 (1990) 2543
15. Ding M.Q., Myers A.F., Choi W.B., Vispute R.D., Camphausen S.M., Narayan J., Cuomo J.J., Hren J.J., and Bruley J. J. Vac. Sci. Technol., B 15 (1997) 840
16. Park M., Camphausen S.M., Myers A.F., Barletta P.T., Sakhrani V., Bergman L., Nemanich R.J., and Cuomo J.J. Mater. Lett. 41 (1999) 229
17. Stöhr J., Samant M.G., Lüning J., Callegari A.C., Chaudhari P., Doyle J.P., Lacey J.A., Lien S.A., Purushothaman S., and Speidell J.L. Science 292 (2001) 2299
18. Takahashi K., Tanga M., Takai O., and Okamura H. Diamond Relat. Mater. 12 (2003) 572