Ion beam alignment for liquid crystal display fabrication

Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms

Volumn 206, Issue , 2003, Pages 467-471

  Doyle, J P ^a   Chaudhari, P ^a   Lacey, J L ^a   Galligan, E A ^a   Lien, S C ^a   Callegari, A C ^a   Lang, N D ^a   Lu, M ^a   Nakagawa, Y ^b   Nakano, H ^b   Okazaki, N ^b   Odahara, S ^b   Katoh, Y ^b   Saitoh, Y ^b   Sakai, K ^b   Satoh, H ^b   Shiota, Y ^b  

^a IBM T J WATSON RESEARCH CENTER   (United States)

^b IBM JAPAN LTD   (Japan)

Author keywords

DLC; Ion beam; LCD; PECVD; Sputter

Indexed keywords

DEFECTS; DIAMOND LIKE CARBON FILMS; ION BEAM ASSISTED DEPOSITION; SPUTTER DEPOSITION;

MECHANICAL RUBBING PROCESSES;

LIQUID CRYSTAL DISPLAYS;

EID: 0038751722     PISSN: 0168583X     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0168-583X(03)00796-1     Document Type: Conference Paper

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