The effect of perimeter geometry on FBAR resonator electrical performance

IEEE MTT-S International Microwave Symposium Digest

Volumn 2005, Issue , 2005, Pages 217-220

  Ruby, R ^a   Larson, J ^a   Feng, C ^a   Fazzio, S ^a  

^a AGILENT TECHNOLOGIES   (United States)

Author keywords

Bulk Acoustic Wave Devices

Indexed keywords

ACOUSTIC RESONATORS; RAYLEIGH SCATTERING;

APODIZATION; ELECTRICAL PERFORMANCE; SQUARE RESONATORS;

ACOUSTIC BULK WAVE DEVICES;

EID: 33749261129     PISSN: 0149645X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/MWSYM.2005.1516563     Document Type: Conference Paper

References (5)

1. R. Ruby, P. Bradley, J. Larson, Y. Oshmyansky, D. Figuruerdo, "Ultra-Miniature, High-Q Filters and Duplexers Using FBAR Technology", ISSCC Symp., Feb. 2001
2. K. Telschow, V. Deason, D. Cottle, J. Larson, "Full-Field Imaging of GHz Film Bulk Acoustic Resonator Motion", IEEE Trans. Ultrason., Ferroelect., Freq., Contr., 50(10), pp. 1279-1285, 2003
3. K. Telschow, Laser Acoustic Imaging of Film Bulk Acoustic Resonator (FBAR) Lateral Mode Dispersion", QNDE Conference, Golden CO, July 2004
4. J.K. Auld, Principles of Acoustics Vol II, Harcourt Press, 1975, pg 134
5. J. Larson, R. Ruby, P.Bradley, "Method for Reducing Lateral Modes in FBAR", U.S. Patent #6215375