Partially oxidized macroporous silicon: A three-dimensional photonic matrix for microarray applications

Advanced Materials

Volumn 18, Issue 23, 2006, Pages 3135-3139

  Klühr, Marco H ^a   Sauermann, Alexander ^a   Elsner, Christian A ^a   Thein, Kerstin H ^a   Dertinger, Stephan K ^a  

^a QIMONDA DRESDEN GMBH AND CO OHG   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

ELECTRIC PROPERTIES; LITHOGRAPHY; OXIDATION; POROSITY;

DEGREE OF EXPANSION; PHOTONIC MATRIX; SPATIALLY SELECTIVE TRANSFORMATION;

POROUS SILICON;

EID: 33846177215     PISSN: 09359648     EISSN: None     Source Type: Journal    
DOI: 10.1002/adma.200600093     Document Type: Article

References (27)

1. U. Grüning, V. Lehmann, S. Ottow, K. Busch, Appl. Phys. Lett. 1996, 68, 747.
2. A. Birner, R. B. Wehrespohn, U. Gösele, K. Busch, Adv. Mater. 2001, 13, 377.
3. H. Masuda, M. Ohya, H. Asoha, M. Nakao, M. Nohtomi, T. Tamamura, Jpn. J. Appl. Phys. 1999, 38, L1403.
4. S. John, Phys. Rev. Lett. 1987, 58, 2486.
5. E. Yablonovitch, Phys. Rev. Lett. 1987, 58, 2059.
6. H. Masuda, K. Fukuda, Science 1995, 268, 1466.
7. S. Matthias, F. Müller, Nature 2003, 424, 53.
8. D. Kovalev, G. Polisski, M. Ben-Chorin, J. Diener, F. Koch, J. Appl. Phys. 1996, 80, 5978.
9. V. Kochergin, Omnidirectional Optical Filters, Kluwer Academic Publishers, Boston, MA 2003.
10. V. Lehmann, R. Stengl, H. Reisinger, R. Detemple, W. Theis, Appl. Phys. Lett. 2001, 78, 589.
11. M. G. Berger, R. Arens-Fischer, M. Kruger, S. Billat, H. Luth, S. Hilbrich, W. Theiss, P. Grosse, Thin Solid Films 1997, 297, 237.
12. M. Steinhart, R. B. Wehrespohn, U. Gösele, J. H. Wendorff, Angew. Chem. Int. Ed. 2004, 43, 1334.
13. Q. Duan Mu, J. Tian, Y. Li, T. Dan, Y. Lu, D. Jiang, L. Fu, Proc. SPIE-Int. Soc. Opt. Eng. 2001, 284.
14. O. H. W. Siegmund, A. S. Tremsin, J. V. Vallerga, C. P. Beetz, R. W. Boerstler, J. Yang, D. R. Winn, Proc. SPIE-Int. Soc. Opt. Eng. 2002, 139.
15. B. J. Cheek, A. B. Steel, M. P. Torres, Anal. Chem. 2001, 73, 5777.
16. V. Benoit, A. B. Steel, M. Torres, Anal. Chem. 2001, 73, 2412.
17. A. Lambacher, P. Fromherz, Appl. Phys. A-Mater. Sci. Process. 1996, 63, 207.
18. D. Braun, P. Fromherz, Phys. Rev. Lett. 1998, 81, 5241.
19. V. Lehmann, J. Electrochem. Soc. 1993, 140, 2836.
20. V. Lehmann, Electrochemistry of Silicon, Wiley-VCH, Weinheim, Germany 2002.
21. R. B. Marcus, T. T. Sheng, J. Electrochem. Soc. 1982, 129, 1278.
22. Y. Wu, P. de Kievit, L. Vahlkamp, D. Pijnenburg, M. Smit, M. Dankers, D. Melchers, M. Stax, P. J. Boender, C. Ingham, N. Bastiaensen, R. de Wijn, D. van Alewijk, H. van Damme, A. K. Raap, A. B. Chan, R. van Beuningen, Nucleic Acids Res. 2004, 32, e123.
23. J. Geistlinger, P. Ahnert, in Modern Biopharmaceuticals (Ed: J. Knäblein), Vol.1, Wiley-VCH, Weinheim, Germany 2005, p. 71.
24. B. Vogelstein, K. W. Kinzler, Proc. Natl. Acad. Sci. USA 1999, 96, 9236.
25. C. C. Czerkinsky, L. A. Nilsson, H. Nygren, O. Ouchterlony, A. Tarkowski, J. Immunol. Methods 1983, 65, 109.
26. J. Ziauddin, D. M. Sabatini, Nature 2001, 411, 107.
27. V. Lehmann, H. Föll, J. Electrochem. Soc. 1990, 137, 653.