A novel four-mask-step low-temperature polysilicon thin-film transistor with self-aligned raised source/drain (SARSD)

IEEE Electron Device Letters

Volumn 28, Issue 1, 2007, Pages 39-41

  Chang, Kow Ming ^a   Lin, Gin Min ^a   Chen, Cheng Guo ^a   Hsieh, Mon Fan ^a  

^a NATIONAL CHIAO TUNG UNIVERSITY   (Taiwan)

Author keywords

Four masks; ON OFF current ratio; Polycrystalline silicon thin film transistor (poly Si TFT); Self aligned raised source drain (SARSD); Thin channel

Indexed keywords

LEAKAGE CURRENTS; MASKS; POLYSILICON;

FOUR MASKS; ON/OFF CURRENT RATIO; SELF-ALIGNED RAISED SOURCE/DRAIN;

THIN FILM TRANSISTORS;

EID: 33845979142     PISSN: 07413106     EISSN: None     Source Type: Journal    
DOI: 10.1109/LED.2006.887933     Document Type: Article

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