Image distortions in SEM and their influences on EBSD measurements

Ultramicroscopy

Volumn 107, Issue 2-3, 2007, Pages 172-183

  Nolze, Gert ^a  

^a BAM FEDERAL INSTITUTE FOR MATERIALS RESEARCH AND TESTING   (Germany)

Author keywords

EBSD; Image distortion; Tilted sample

Indexed keywords

ANGLE MEASUREMENT; BACKSCATTERING; ELECTRON DIFFRACTION; ERROR CORRECTION; SAMPLING; SCANNING ELECTRON MICROSCOPY;

IMAGE DISTORTION; TILTED SAMPLES; TRAPEZIUM;

IMAGE QUALITY;

ANALYTICAL ERROR; ARTICLE; ELECTRON BACK SCATTER DIFFRACTION; ELECTRON DIFFRACTION; IMAGE ANALYSIS; MATHEMATICAL ANALYSIS; MATHEMATICAL MODEL; MEASUREMENT; REPRODUCIBILITY; SCANNING ELECTRON MICROSCOPE;

TRAPEZIUM;

EID: 33845774250     PISSN: 03043991     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.ultramic.2006.07.003     Document Type: Article

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