Large area micro hot embossing of Pyrex glass with GC mold machined by dicing

Microsystem Technologies

Volumn 13, Issue 3-4, 2007, Pages 379-384

  Takahashi, Masaharu ^a   Murakoshi, Yoichi ^a   Maeda, Ryutaro ^a   Hasegawa, Kohei ^b  

^a NATIONAL INSTITUTE OF ADVANCED INDUSTRIAL SCIENCE AND TECHNOLOGY AIST   (Japan)

^b Itou Seiko Co   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

DRY ETCHING; MICROELECTROMECHANICAL DEVICES; MICROSTRUCTURE; MOLDING; REFRACTIVE INDEX;

HOT EMBOSSING; NANO IMPRINTING; PYREX GLASSES; UV ABSORPTION;

GLASS;

EID: 33845755424     PISSN: 09467076     EISSN: None     Source Type: Journal    
DOI: 10.1007/s00542-006-0186-z     Document Type: Article

References (11)

1. Akagi Y, Rao SR, Morita Y, Tamiya E (2004) Optimization of fluorescent cell-based assays for high-throughput analysis using microchamber array chip formats. Sci Techol Adv Mater 5:343-349
2. Hirai Y, Fujiwara M, Okuno T, Tanaka Y, Endo M, Irie S, Nakagawa K, Sasago M (2001) J Vac Sci Technol B 19:2811
3. Holger Becker, Claudia Gaertner (2001) Polymer based micro reactor. Mol Biotechnol 82:89-99
4. Holger Becker, Ulf Heim (2000) Hot embossing as a method for the fabrication of polymer high aspect ratio structures. Sens Actuators A 83:120-135
5. Itou K, Sugimoto K (2003) Proceedings of the Japan Society precision engineering conference, C26, Spring 2003, pp 111
6. Li X, Abe T, Liu Y, Esashi M (2001) Proceedings MEMS 2001, Interlaken 98
7. Masaharu Takahashi, Yoichi Murakoshi, Kohichi Sugimoto, Ryutaro Maeda (2004) Micro/Nano hot embossing pyrex glass with glassy carbon mold fabricated by focused-ion beam etching. In: Symposium on DTIP 2004, pp 441-446
8. Miyamoto I (1995) J Jpn Soc Technol Plastic 36(411):307
9. Nagai H, Murakami Y, Morita Y, Yokoyama K, Tamiya E (2001) Development of a microchamber array for picoliter PCR. Anal Chem 73:1043-1047
10. Shan XC, Maeda R, Murakoshi Y (2002) Proceedings SPIE 4936, pp 67
11. Umetani M (1995) J Jpn Soc Technol Plastic 36(411):350