Fabrication of nano- and micro-scale UV imprint stamp using diamond-like carbon coating technology

Journal of Nanoscience and Nanotechnology

Volumn 6, Issue 11, 2006, Pages 3619-3623

  Lee, Eung Sug ^a   Jeong, Jun Ho ^a   Kim, Ki Don ^a   Sim, Young Suk ^a   Choi, Dae Geun ^a   Choi, Junhyuk ^a   Park, Sang Hu ^b   Lim, Tae Woo ^b   Yang, Dong Yol ^b   Cha, Nam Goo ^c   Park, Jin Goo ^c   Lee, Wi Ro ^d  

^a Korea Institute of Machine and Materials   (South Korea)

^b Korea Advanced Institute of Science and Technology (KAIST)   (South Korea)

^c Hanyang University   (South Korea)

^d Industry and Energy   (South Korea)

Author keywords

Diamond like carbon; Focused ion beam; Stamp; UV imprint lithography

Indexed keywords

CARBON COATING; FOCUSED ION BEAM; NANOIMPRINT LITHOGRAPHY; PHOTON POLYMERIZATION PATTERNING; UV-IMPRINT LITHOGRAPHY;

DIAMOND LIKE CARBON FILMS; ION BEAM LITHOGRAPHY; POLYMERIZATION; QUARTZ; SUBSTRATES;

NANOTECHNOLOGY;

BIOMATERIAL; CARBON; DIAMOND; ION; POLYMER;

ADHESION; ARTICLE; CHEMISTRY; EQUIPMENT DESIGN; INSTRUMENTATION; MATERIALS TESTING; METHODOLOGY; NANOTECHNOLOGY; PHOTON; SCANNING ELECTRON MICROSCOPY; ULTRAVIOLET RADIATION;

ADHESIONS; BIOCOMPATIBLE MATERIALS; CARBON; DIAMOND; EQUIPMENT DESIGN; IONS; MATERIALS TESTING; MICROSCOPY, ELECTRON, SCANNING; NANOTECHNOLOGY; PHOTONS; POLYMERS; ULTRAVIOLET RAYS;

EID: 33845746362     PISSN: 15334880     EISSN: None     Source Type: Journal    
DOI: 10.1166/jnn.2006.068     Document Type: Conference Paper

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