Fermi level analysis of group III nitride semiconductor device structures by Auger peak position measurements

Journal of Electrical Engineering

Volumn 57, Issue 6, 2006, Pages 354-359

  Ecke, Gernot ^a   Niebelschütz, Merten ^a   Kosiba, Rastislav ^a   Rossow, Uwe ^b   Cimalla, Volker ^a   Liday, Jozef ^c   Vogrinčič, Peter ^c   Pezoldt, Jörg ^a   Lebedev, Vadim ^a   Ambacher, Oliver ^a  

^a ILMENAU UNIVERSITY OF TECHNOLOGY   (Germany)

^b TECHNICAL UNIVERSITY OF BRAUNSCHWEIG   (Germany)

^c SLOVAK UNIVERSITY OF TECHNOLOGY   (Slovakia)

Author keywords

Auger electron spectroscopy; Auger peak position; Fermi level; Group III nitrides; Sputter depth profiling

Indexed keywords

EID: 33845663267     PISSN: 13353632     EISSN: None     Source Type: Journal    
DOI: None     Document Type: Article

References (13)

1. VASILYEV, M. G. - KLYACHKO, D. V. - KRIGEL, V. G. - RAZUMOVSKAYA, I. V.: Poverchnost' No. 1 (1985), 97.
2. th European Conference.
3. KOSIBA, R.: Augerelektronenspektroskopie und niederenergetischer lonenbeschuss von Siliziumkarbid, Thesis, TU Ilmenau 2004.
4. CAI, D. - XU, F. - KANG, J. - GIBART, P. - BEAUMONT, B.: APL 86, 211917 (2005).
5. HOFMANN, S.: Chapter 4 in Practical Surface Analysis, Vol. 1 - Auger and X-Rray Photoelectron Spectroscopy (D. Briggs and M. P. Seah, eds.), Wiley, Chinchester, 1990.
6. WU, C. I. - KAHN, A. - TASKAR, N. - DORMAN, D. - GALLAGHER, D.: J. Appl. Phys. 83 No. 8 (1998), 4249-4252.
7. Elektronenenergie-Verlustspektroskopie an Gruppe-III-Nitriden und Übergangsmetall-Oxiden, Thesis W. Niessner, University Giessen 2002.
8. NIEBELSCHÜTZ, M. - ECKE, G. - CIMALLA, V. - TONISCH, K. - AMBACHER, O.: J. Appl. Phys. 100 (2006), 074909.
9. LEE, S. R. - WRIGHT, A. F. - CRAWFORD, M. H. - PETERSEN, G. A. - HAN, J. - BIEFELD, R. M.: Appl. Phys. Let. 74 No. 22 (1999), 3344-3346.
10. GOLDHAHN, R. - SCHLEY, P. - WINZER, A. T. - GOBSCH, G. - CIMALLA, V. - AMBACHER, O. - RAKEL, M. - COBUT, C. - ESSER, N. - LU, H. - SCHAFF, W. J.: Phys. Stat. Sol. (a) 203 (2006), 42-49.
11. CIMALLA, V. - NIEBELSCHÜTZ, M. - ECKE, G. - AMBACHER, O. - GOLDHAHN, R. - LU, H. - SCHAFF, W. J.: Phys. Stat. Sol. (c) 3 (2006), 1721-1724.
12. CIMALLA, V. - NIEBELSCHÜTZ.M. - ECKE.G. - LEBEDEV, V. - AMBACHER,O. - HIMMERLICH,M. - KRISCHOK,S. - SCHAEFER,J. A. - LU,H. - SCHAFF,W.J.: Phys. Stat. Sol. (a) 203 No. 1 (2006), 59.
13. CIMALLA, V. - ECKE, G. - NIEBELSCHÜTZ, M. - AMBA- CHER, O. - GOLDHAHN, R. - LU, H. - SCHAFF, W. J.: Phys. Stat. Sol. (c) 7 (2005), 2254-2257.