Temperature effect on the formation of a relief of diamond-like carbon coatings and its modification by ion bombardment

Physics of Metals and Metallography

Volumn 102, Issue 6, 2006, Pages 626-631

  Rubshtein, A P ^a   Trakhtenberg, I Sh ^a   Yugov, V A ^a   Vladimirov, A B ^a   Plotnikov, S A ^a   Ponosov, Yu S ^a  

^a INSTITUTE OF METAL PHYSICS   (Russian Federation)

Author keywords

[No Author keywords available]

Indexed keywords

COATING TECHNIQUES; FILM GROWTH; ION BOMBARDMENT; MICROHARDNESS; MONOLAYERS; THERMAL EFFECTS;

CHEMICALLY ACTIVE OXYGEN; INTERATOMIC BONDS; ION IRRADIATION; SURFACE LAYERS;

DIAMOND LIKE CARBON FILMS;

EID: 33845612640     PISSN: 0031918X     EISSN: None     Source Type: Journal    
DOI: 10.1134/S0031918X06120106     Document Type: Article

References (23)

1. Y. Lifshitz, "Diamond-Like Carbon - Present Status," Diamond Relat. Mater. 8, 1659-1676 (1999).
2. I. I. Aksenoy and V. E. Steel'nitsky, "Synthesis of Hydrogen-Free Diamond-Like Coatings," in Proceedings of ISFTE-12, Kharkov, Ukraine (Kharkov, 2001), pp. 96-103.
3. D. M. Sanders and A. Anders, "Review of Cathodic Arc Deposition Technology at the Start of the New Millennium," Surf. Coating Technol. 133-134, 78-90 (2000).
4. M. I. Samoilovich and A. F. Belyanin, "Diamond and Diamond-Like Carbon Films: Formation and Structure," in Diamond Films and Films of Related Materials. Proceedings of Kharkov Science Assembly ISFTF-15 (Kharkov, 2003), pp. 6-38.
5. A. B. Vladimirov, I. Sh. Trakhtenberg, O. M. Bakunin, et al., "The Effect of Substrate and DLC Morphology on the Tribological Properties Coating," Diamond Relat. Mater. 9, 838-842 (2000).
6. V. N. Inkin, G. G. Kirpilenko, and A. J. Kolpakov, "Internal Stresses in Ta-C Films Deposited by Pulse Arc Discharge Method," Diamond Relat. Mater. 10, 1103-1108 (2001).
7. V. E. Strel'nitskii, "Synthesis Processes and Physical Properties of Diamond-Like Carbon Coatings Obtained by Vacuum-Arc Method," in Diamond Films and Films of Related Materials. Proceedings of Kharkov Science Assembly ISFTF-15 (Kharkov, 2003), pp. 104-115.
8. I. Sh. Trakhtenberg, A. B. Vladimirov, V. A. Yugov, et al., "Certification of Mechanical Properties of Hard Diamond-Like Coatings (DLC)," Fiz. Met. Metalloved. 99 (6), 103-107 (2005)
9. [Phys. Met. Metallogr. 99, 649-653 (2005)].
10. + Ions: Experimental Studies," Diamond Relat. Mater. 4, 318-323 (1995).
11. A. B. Vladimirov, I. Sh. Trakhtenberg, S. A. Plotnilov, et al., "Modification of Amorphous DLC Films by Low Energy Ion Bombardment," Diamond Relat. Mater. 5, 943-946 (1996).
12. S. Logothetidis, Ch. B. Lioutas, and M. Gipti, "Post-Growth Modification of Amorphous Carbon Films under Ion Beam Bombardment: Grain Size Dependence on the Film Thickness," Diamond Relat. Mater. 7, 449-453 (1998).
13. I. Sh. Trakhtenberg, A. B. Vladimirov, A. P. Rubstein, et al., "The Analysis of Microhardness Measurement Approach for Characterization of Hard Coatings," Diamond Relat. Mater. 12, 1788-1792 (2003).
14. A. P. Dementjev, K. I. Maslakov, K. Uemura, et al., "Identification of Chemical Bonds on Upper Layers of DLC Using Auger Spectroscopy and XPS," in Proceeding of ADC/FCT 2003 Conference (2003), pp. 345-349.
15. P. A. Arutyunov, A. L. Tolstikhina, and V. N. Demidov, "The Set of Parameters for Analysis of Roughness and Surface Microrelief of Materials in Scanning Probe Microscopy," Zavod. Lab. 65 (9), 27-37 (1999).
16. F. C. Ferrari, "Determination of Bonding in Diamond-Like Carbon by Raman Spectroscopy," Diamond Relat. Mater. 11, 1053-1061 (2002).
17. I. Sh. Trakhtenberg, A. P. Rubshtein, and A. B. Vladimirov, "Formation of Morphology of Surface of Diamond-Like Films Condensed upon Arc Deposition of Graphite in a Vaccum", Fiz. Met. Metalloved. 100 (1), 65-70 (2005)
18. [Phys. Met. Metallogr. 100, 56-60 (2005)].
19. A. V. Dvurechenskii, V. A. Zinoviev, et al. "Morphology and Reconstruction of Surface during Ge/Si Heteroepitaxy under Low-Energy Ion Beam," in Proceeding of 11th International Conference on Radiation Physics and Chemistry of Condensed Matter, Tomsk, Russia (Tomsk, 2000), pp. 238-242.
20. M. Hakovirta, I. Koronen, R. Lappalainen, et al., "Protrusions on the Surface of Graphite Cathode Used in the Tetrahedral Amorphous Carbon Film Deposition," Diamond Relat. Mater. 7, 23-35 (1998).
21. K. Yamamoto, K. Wazumi, T. Watanabe, et al., "Tribological Properties of Diamond-Like Carbon Films Prepared by Mass-Separated Ion Beam Deposition," Diamond Relat. Mater. 11, 1130-1134 (2000).
22. Ye. L. Ostrovskaya and V. E. Strel'nitskij, "Effect of Micromechanical Properties of DLC Coatings on Their Frictional Behavior under Cryogenic Temperatures," in Proceeding of 12th International Symposium ISTFE-12 (Kharkov, 2001), pp. 141-145.
23. J. F. Ziegler and J. P. Biersack, The Stopping Range of Ion in Solids (Pergamon, New York, 1985).