The CVD of nanocomposites fabricated via ultrasonic atomization

Chemical Vapor Deposition

Volumn 12, Issue 4, 2006, Pages 225-230

  Ross, April D ^a   Gleason, Karen K ^a  

^a Massachusetts Institute of Technology Cambridge   (United States)

Author keywords

Atomization; Nanocomposites; Plasma enhanced CVD; Porogen; Thin films

Indexed keywords

ATOMIZATION; ELEMENTARY PARTICLES; FOURIER TRANSFORM INFRARED SPECTROSCOPY; PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION; SOLVENTS; THIN FILMS;

FLUORESCENCE MICROSCOPY; PARTICLE DEPOSITION; POROGEN; ULTRASONIC ATOMIZATION;

NANOSTRUCTURED MATERIALS;

EID: 33845595154     PISSN: 09481907     EISSN: 15213862     Source Type: Journal    
DOI: 10.1002/cvde.200506368     Document Type: Article

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