SiC warm-wall planetary VPE growth on multiple 100-mm diameter wafers

Materials Science Forum

Volumn 527-529, Issue PART 1, 2006, Pages 159-162

  Burk, A A ^a   O'Loughlin, M J ^b   Paisley, M J ^b   Powell, A R ^b   Brady, M F ^b   Leonard, R T ^b   McClure, D A ^b  

^a Arkansas Power Electronics International Inc   (United States)

^b NONE

Author keywords

100 mm wafers; Epitaxy; Planetary; Warm wall

Indexed keywords

DOPING (ADDITIVES); EPITAXIAL LAYERS; OPTIMIZATION; SILICON CARBIDE; SILICON WAFERS;

100-MM WAFERS; EPITAXIAL LAYER GROWTH; PLANETARY; WARM-WALL;

EPITAXIAL GROWTH;

EID: 33845585416     PISSN: 02555476     EISSN: 16629752     Source Type: Book Series    
DOI: 10.4028/0-87849-425-1.159     Document Type: Conference Paper

References (10)

1. P. M. Frijlink: J. Crystal Growth, Vol. 93 (1988) p.207.
2. A. A. Burk, M. J. O'Loughlin, and S. S. Mani: Silicon Carbide and Related Materials 1997, Materials Science Forum Vols. 264-268 (1998) p. 83.
3. A. A. Burk, Jr., M. J. O'Loughlin, and H. D. Nordby, Jr.: J. Crystal Growth, Vol. 200 (1999), p. 458.
4. M. J. O'Loughlin, H. D. Nordby, Jr., and A. A. Burk: Mat. Res. Soc. Symp. Proc. Vol. 572 (1999)p.161.
5. A. A. Burk, M. J. O'Loughlin, M. J. Paisley, A. R. Powell, M. F. Brady, R. T. Leonard, St.G. Müller and S.T. Allen: Silicon Carbide and Related Materials 2004, Materials Science Forum Vols. 483-485 (2005) p. 137.
6. B. Thomas and C. Hecht: Silicon Carbide and Related Materials 2004, Materials Science Forum Vols. 483-485 (2005) p. 141.
7. Fei Yan and W. J. Choyke, University of Pittsburgh, Pittburgh, PA.
8. S. Krishnaswami and A. Agarwal, these proceedings.
9. A.Veneroni, F. Omarini, M. Masi, S. Leone, M. Mauceri, G. Pistone, and G. Abbondanza: Silicon Carbide and Related Materials 2004, Materials Science Forum Vols. 483-485 (2005) p. 57.
10. J. J. Sumakeris, M. K. Das, S. Ha, E.Hurt, K. Irvine, M. J. Paisley, M. J. O'Loughlin, J. W. Palmour, M. Skowronski, H. McD. Hobgood, and C. H. Carter, Jr.: Silicon Carbide and Related Materials 2004, Materials Science Forum Vols. 483-485 (2005) p. 155.