Experimental investigation and simulation of silicon droplets formation during SiC CVD epitaxial growth

Materials Science Forum

Volumn 483-485, Issue , 2005, Pages 105-108

  Melnychuk, G ^a   Koshka, Y ^a   Mazzola, M S ^a   Wyatt, J L ^a  

^a MISSISSIPPI STATE UNIVERSITY   (United States)

Author keywords

CVD; Droplets; Epitaxial growth; Hot wall; Implant annealing; Simulation

Indexed keywords

ANNEALING; CHEMICAL VAPOR DEPOSITION; CONDENSATION; DEPOSITION; DROPS; EPITAXIAL GROWTH; SILANES;

IMPLANT ANNEALING; SILANE OVERPRESSURE; SILICON DROPLETS; SILICON VAPOR CONDENSATION;

SILICON CARBIDE;

EID: 33845581586     PISSN: 02555476     EISSN: 16629752     Source Type: Book Series    
DOI: None     Document Type: Conference Paper

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