High temperature and high sensitive NOX gas sensor with hetero-junction structure using laser ablation method

IEEJ Transactions on Sensors and Micromachines

Volumn 126, Issue 12, 2006, Pages

  Gao, Wei ^a   Shi, Liqin ^a   Hasegawa, Yuki ^a   Katsube, Teruaki ^a  

^a SAITAMA UNIVERSITY   (Japan)

Author keywords

Hetero junction device; NOX gas sensor; SiC

Indexed keywords

ELECTRODES; HETEROJUNCTIONS; LASER ABLATION; NITROGEN OXIDES; SENSITIVITY ANALYSIS; SILICON CARBIDE;

HETERO-JUNCTION DEVICES; METAL-OXIDE FILMS; NOX GAS SENSORS;

CHEMICAL SENSORS;

EID: 33845579917     PISSN: 13418939     EISSN: 13475525     Source Type: Journal    
DOI: None     Document Type: Article

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