Silicon-carbide MOS capacitors with laser-ablated Pt gate as combustible gas sensors

Sensors and Actuators, B: Chemical

Volumn 63, Issue 1, 2000, Pages 91-102

  Samman, A ^a   Gebremariam, S ^a   Rimai, L ^a   Zhang, X ^a   Hangas, J ^a   Auner, G W ^b  

^a FORD MOTOR COMPANY   (United States)

^b WAYNE STATE UNIVERSITY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

INTERNAL COMBUSTION ENGINES; LASER ABLATION; MOS CAPACITORS; PLATINUM; PULSED LASER APPLICATIONS; SILICON CARBIDE;

COMBUSTIBLE GAS SENSORS;

CHEMICAL SENSORS;

EID: 0033871593     PISSN: 09254005     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0925-4005(00)00290-2     Document Type: Article

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