Development of new method for fluid simulation of capacitively coupled plasma discharge

Journal of the Korean Physical Society

Volumn 49, Issue 5, 2006, Pages 1967-1971

  Kim, Hyung Yong ^a   Kwon, Deuk Chul ^a   Yoon, Nam Sik ^a   Choe, Hee Hwan ^b   Kim, Jung Hyung ^c  

^a Chungbuk National University   (South Korea)

^b Hankuk Aviation University   (South Korea)

^c Korea Research Institute of Standards and Science   (South Korea)

Author keywords

CCP; Fluid; Numerical method; Simulation

Indexed keywords

EID: 33845562612     PISSN: 03744884     EISSN: None     Source Type: Journal    
DOI: None     Document Type: Article

References (11)

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