A New Unconditionally Stable Algorithm for Steady-State Fluid Simulation of High Density Plasma Discharge

Journal of Computational Physics

Volumn 170, Issue 2, 2001, Pages 550-561

  Choe, Hee Hwan ^a   Yoon, N S ^b   Kim, S S ^c   Choi, Duk In ^a  

^a Korea Advanced Institute of Science and Technology (KAIST)   (South Korea)

^b Chungbuk National University   (South Korea)

^c KYOTO UNIVERSITY   (Japan)

Author keywords

Fluid; Numerical method; Perturbation; Simulation

Indexed keywords

ELECTRIC DISCHARGES; INDUCTIVELY COUPLED PLASMA; PERTURBATION TECHNIQUES;

FLUID SIMULATIONS; HIGH DENSITY PLASMAS; ONE-DIMENSIONAL; PERTURBATION; PLASMA DISCHARGE; SIMULATION; SIMULATION TIME; STEADY STATE; TIME STEP; UNCONDITIONALLY STABLE ALGORITHMS;

NUMERICAL METHODS;

EID: 0013000959     PISSN: 00219991     EISSN: None     Source Type: Journal    
DOI: 10.1006/jcph.2001.6748     Document Type: Article

References (8)

1. M. A. Lieberman and R. A. Gottscho, Design of high-density plasma sources for material processing, in Physics of Thin Films, edited by M. H. Francombe and J. L. Vossen, (Academic Press, New York, 1994), Vol. 18.
2. R. A. Stewart, P. Vitello, and D. B. Graves, J. Vac. Sci. Technol. B 12(1), 478 (1994).
3. P. L. G. Ventzek, R. J. Hoekstra, and M. J. Kushner, J. Vac. Sci. Technol. B 12(1), 461 (1994).
4. N. S. Yoon, Nak-Heon Choi, Hyoung-Bin Park, and Duk-In Choi, IEEE Trans. Plasma Sci. 23(4), 461 (1995).
5. S. V. Patankar, Numerical Heat Transfer and Fluid Flow (McGraw-Hill, New York, 1980).
6. M. S. Barnes, T. J. Colter, and M. E. Elta, J. Appl. Phys. 61(1), 81 (1987).
7. J.-P. Boeuf, Phys. Rev. A 36(6), 2782 (1987).
8. N. S. Yoon, S. S. Kim, C. S. Chang, and Duk-In Choi, J. Korean Phys. Soc. 28(2), 172 (1996).