메뉴 건너뛰기




Volumn 220, Issue 9, 2006, Pages 1463-1479

Dynamic analysis of a microelectromechanical systems resonant gyroscope excited using combination parametric resonance

Author keywords

Gyroscope; Multiple scales; Parametric excitation; Rate sensor

Indexed keywords

COMPUTER SIMULATION; DEGREES OF FREEDOM (MECHANICS); ELECTROSTATIC ACTUATORS; EQUATIONS OF MOTION; MATHEMATICAL MODELS; MICROELECTROMECHANICAL DEVICES; PERTURBATION TECHNIQUES; STIFFNESS;

EID: 33845318549     PISSN: 09544062     EISSN: None     Source Type: Journal    
DOI: 10.1243/09544062JMES196     Document Type: Article
Times cited : (7)

References (17)
  • 1
    • 0032138896 scopus 로고    scopus 로고
    • Micromachined inertial sensors
    • Yazdi, N., Ayazi, F., and Najafi, K. Micromachined inertial sensors. Proc. IEEE, 1998, 86, 1640-1659.
    • (1998) Proc. IEEE , vol.86 , pp. 1640-1659
    • Yazdi, N.1    Ayazi, F.2    Najafi, K.3
  • 2
    • 33845296350 scopus 로고    scopus 로고
    • The performance and future development of a MEMS SiVSG and its application to the SiIMU
    • In Stuttgart, Germany
    • Pearce, C. H. The performance and future development of a MEMS SiVSG and its application to the SiIMU. In Proceedings of DGON Symposium Gyro Technology, Stuttgart, Germany, 2001.
    • (2001) Proceedings of DGON Symposium Gyro Technology
    • Pearce, C.H.1
  • 3
    • 0035368205 scopus 로고    scopus 로고
    • A HARPSS polysilicon vibrating ring gyroscope
    • Ayazi, F. and Najafi, K. A HARPSS polysilicon vibrating ring gyroscope. J. Microelectromech. Syst., 2001, 10(2), 169-179.
    • (2001) J. Microelectromech. Syst. , vol.10 , Issue.2 , pp. 169-179
    • Ayazi, F.1    Najafi, K.2
  • 5
    • 0032292826 scopus 로고    scopus 로고
    • Issues associated with the design, fabrication and testing of a crystalline silicon ring gyroscope with electromagnetic actuation and sensing
    • Harris, A. J., Burdess, J. S., Wood, D., Langford, R., Williams, G., Ward, M. C. L., and McNie, M. E. Issues associated with the design, fabrication and testing of a crystalline silicon ring gyroscope with electromagnetic actuation and sensing. J. Micromech. Microeng., 1998, 8, 284-292.
    • (1998) J. Micromech. Microeng. , vol.8 , pp. 284-292
    • Harris, A.J.1    Burdess, J.S.2    Wood, D.3    Langford, R.4    Williams, G.5    Ward, M.C.L.6    McNie, M.E.7
  • 12
    • 85147672538 scopus 로고
    • Further results on the parametric excitation of a dynamic system
    • Hsu, C. S. Further results on the parametric excitation of a dynamic system. J. Appl. Mech., 1965, 32, 373-377.
    • (1965) J. Appl. Mech. , vol.32 , pp. 373-377
    • Hsu, C.S.1
  • 14
    • 0004261332 scopus 로고
    • (Cambridge University Press, New York)
    • Hinch, E. J. Perturbation methods, 1991 (Cambridge University Press, New York).
    • (1991) Perturbation Methods
    • Hinch, E.J.1
  • 15
    • 0022777311 scopus 로고
    • Electrostatic excitation of high Q axisymmetric shell resonators
    • Burdess, J. S. Electrostatic excitation of high Q axisymmetric shell resonators. J. Sound Vib., 1986 109(3), 481-494.
    • (1986) J. Sound Vib. , vol.109 , Issue.3 , pp. 481-494
    • Burdess, J.S.1


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.