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Volumn 24, Issue 6, 2006, Pages 2769-2771
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Fabrication of nanoelectromechanical resonators using a cryogenic etching technique
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Author keywords
[No Author keywords available]
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Indexed keywords
CRYOGENICS;
ETCHING;
NANOSTRUCTURED MATERIALS;
PASSIVATION;
RESONATORS;
SILICON WAFERS;
TEMPERATURE CONTROL;
CRYOGENIC ETCHING TECHNIQUES;
LIQUID NITROGEN;
NANOELECTROMECHANICAL RESONATORS;
PLASMA REACTORS;
ELECTROMECHANICAL DEVICES;
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EID: 33845272153
PISSN: 10711023
EISSN: None
Source Type: Journal
DOI: 10.1116/1.2366608 Document Type: Article |
Times cited : (4)
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References (12)
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