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Volumn 24, Issue 6, 2006, Pages 2769-2771

Fabrication of nanoelectromechanical resonators using a cryogenic etching technique

Author keywords

[No Author keywords available]

Indexed keywords

CRYOGENICS; ETCHING; NANOSTRUCTURED MATERIALS; PASSIVATION; RESONATORS; SILICON WAFERS; TEMPERATURE CONTROL;

EID: 33845272153     PISSN: 10711023     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.2366608     Document Type: Article
Times cited : (4)

References (12)
  • 9
    • 33845249212 scopus 로고    scopus 로고
    • http://www.oxford-instruments.com/
  • 10
    • 34249910031 scopus 로고    scopus 로고
    • 3rd ed., edited by R.Meyers (Academic, New York
    • J. Blake, in Encyclopedia of Physical Science and Technology, 3rd ed., edited by, R. Meyers, (Academic, New York, 2002), Vol. 14, pp. 805-813.
    • (2002) Encyclopedia of Physical Science and Technology , vol.14 , pp. 805-813
    • Blake, J.1
  • 11
    • 33845256602 scopus 로고    scopus 로고
    • http://www.microchem.com/


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.