Electron scattering by gas in the Environmental Scanning Electron Microscope (ESEM): Effects on the image quality and on the X-ray microanalysis

Journal De Physique. IV : JP

Volumn 118, Issue , 2004, Pages 237-243

  Khouchaf, L ^a   Verstraete, J ^a  

^a ECOLE DES MINES DE DOUAI   (France)

Author keywords

[No Author keywords available]

Indexed keywords

AMPLIFICATION; CHEMICAL STABILITY; ELECTRON BEAMS; ELECTRON ENERGY LOSS SPECTROSCOPY; HELIUM; IMAGE QUALITY; MICROANALYSIS; MICROSCOPES; NEGATIVE IONS; PHOTODEGRADATION; RADIOACTIVITY; SCANNING; SCANNING ELECTRON MICROSCOPY; SCATTERING; SIGNAL TO NOISE RATIO; WATER VAPOR;

CHEMICAL CONTRASTS; ELECTRON BEAM SCATTERINGS; ENVIRONMENTAL SCANNING ELECTRON MICROSCOPES; FRAGILE MATERIALS; LIMIT OF DETECTIONS; MICRO-ANALYSIS SYSTEMS; MICRONIC PARTICLES; SIGNAL-TO-NOISE RATIOS; WATER VAPOURS; X-RAY MICROANALYSIS;

ELECTRONS;

EID: 33751320748     PISSN: 11554339     EISSN: 17647177     Source Type: Conference Proceeding    
DOI: 10.1051/jp4:2004118028     Document Type: Article

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