Influence of the SiO and SiON buffer layer on IZO thin films deposited on PET by inclination opposite target type DC magnetron sputtering method

International Journal of Modern Physics B

Volumn 20, Issue 25-27, 2006, Pages 3640-3645

  Qiu, Zhiyong ^a   Shin, Do Hoon ^a   Nakada, Kenji ^a   Murakami, Ri Ichi ^a   Yoon, Han Ki ^b  

^a UNIVERSITY OF TOKUSHIMA   (Japan)

^b Dong Eui University   (South Korea)

Author keywords

Buffer layer; Electrical properties; Indium zinc oxide; Multilayer; Optical properties

Indexed keywords

EID: 33751297832     PISSN: 02179792     EISSN: None     Source Type: Journal    
DOI: 10.1142/s021797920604012x     Document Type: Conference Paper

References (16)

1. A.C. Arias, L.S. Roman, T. Kugler, R. Toniolo, M.S. Meruvia, I.A. Hummelgen: Thin Solid Films. 371, 201 (2000).
2. F. Zhu, K. Zhang, B.L. Low, S.F. Lim, S.J. Chua, Materials Science and Engineering, B85, 114 (2001).
3. D. Vaufrey, M.B. Khalifa, M.P. Besland, J. Tardy, C. Sandu, M.G. Blanchin, J.A. Roger, Materials Science and Engineering, C21, 265 (2001).
4. Kenji Nomura, Hiromichi Ohta, Akihiro Takagi, Toshio Kamiya, asahiro Hirano, Hideo Hosono, Letter to Nature, 432, 488 (2004).
5. V. Teixerra, H.N. Cui, L.J. Meng, E. Fortunate, R. Martins, Thin Solid Films, 420, 70 (2002).
6. H. Ma, J. Cho, C. Park, Surface and Coatings Technology, 153, 131 (2002).
7. H.M. Kim, S.K. Jeung, J.S. Ahn, Y.J. Kang, K.C. Je, Jpn. J. Appl. Phys, 42, 223 (2003).
8. D.S. Wuu, W.C. Lo, L.S. Chang, R.H. Horng, Thin Solid Films, 468, 105 (2004).
9. Satoru Iwamori, Yumi Gotoh, Hrzysztof Moorthi, Vacuum, 68, 113 (2003).
10. D.H. Shin, C.M. Yim, R. Murakami, D. yonekura, Surface and Coatings Technology, in press.
11. Y.S. Jung, J.Y. Seo, D.W. Lee, D.Y. Jeon, Thin Solid Films, 445, 63 (2003).
12. W.M. Kim, D.Y. Ku, I.K. Lee, Y.W. Seo, B. Cheong, T.S. Lee, I. Kim, K.S. Lee, Thin Solid Films, 473, 315 (2005).
13. D.H. Zhang, H.L. Ma, Appl. Phys. A, 62, 487 (1996).
14. Lata.Gupta, Abhai Mansingh, P.K. Srivastava, Thin Solid Films, 176, 33 (1989).
15. S. Schmitt-Rink, D.A.B. Miller, D.S. Chemla, Phys. Rev. B, 35, 8113 (1987).
16. Y.S. Song, J.K. Park, T.W. Kim, C.W. Chung, Thin Solid Films, 467, 117 (2004).