Rapid determination of stress factors and absolute residual stresses in thin films

Journal of Applied Crystallography

Volumn 39, Issue 6, 2006, Pages 777-783

  Martinschitz, K J ^a   Eiper, E ^a   Massl, S ^a   Kostenbauer H ^a   Daniel, R ^a   Fontalvo, G ^a   Mitterer, C ^a   Keckes, J ^a  

^a UNIVERSITY OF LEOBEN   (Austria)

Author keywords

Stress analysis; Thin films

Indexed keywords

EID: 33751257778     PISSN: 00218898     EISSN: 16005767     Source Type: Journal    
DOI: 10.1107/S002188980603322X     Document Type: Article

References (19)

1. Barral, M., Lebrun, J. L., Sprauel, J. M. & Maeder, G. (1987). Metall. Mater. Trans. A, 18A, 1229-1238.
2. Dölle, H. (1979). J. Appl. Cryst. 12, 489-501.
3. Freund, L. B. & Suresh, S. (2003). Thin Film Materials. Stress, Defect Formation and Surface Evolution. Cambridge University Press.
4. Hauk, V. (1997). Editor. Structural and Residual Stress Analysis by Nondestructive Methods. Amsterdam: Elsevier.
5. Houtte, P. van & de Byser, L. (1993). Acta Mater. 41, 323-336.
6. Hultman, L. (2000). Vacuum, 57, 1-30.
7. Kutschej, K., Mayrhofer, P. H., Kathrein, P., Polcik, P., Tessadri, R. & Mitterer, C. (2005). Surf. Coat. Technol. 200, 2358-2365.
8. Marion, R. H. & Cohen, J. B. (1977). Adv. X-ray Anal. 20, 355-367.
9. Mayrhofer, P. H., Kunc, F., Musil, J. & Mitterer, C. (2002). Thin Solid Films, 415, 151-159.
10. Mitterer, C., Mayrhofer, P. H. & Musil, J. (2003). Vacuum, 71, 279-284.
11. Noyan, I. C. & Cohen, J. B. (1987). Residual Stress. Measurement by Diffraction and Interpretation. New York: Springer.
12. Ortner, B. (2006). J. Appl. Cryst. 39, 401-409.
13. Pina, J., Dias, A. & Lebrun, J. L. (1999). Mater. Sci. Eng. A, 267, 130-144.
14. Rant, S. J., Goldsmith, C. C. & Noyan, I. C. (1994). Adv. X-ray Anal. 37, 157-165.
15. Renault, P. O., Bourhis, E. L., Villain, P., Goudeau, P., Badawi, K. W. & Faurie, D. (2003). Appl. Phys. Lett. 83, 473-475.
16. Segmüller, A., Noyan, I. C. & Speriosu, V. S. (1989). Prog. Cryst. Growth Charact. Mater. 18, 21-66.
17. Stoney, G. G. (1909). Proc. R. Soc. A, 82, 172.
18. Welzel, U., Leoni, M. & Mittemeijer, E. J. (2003). Philos. Mag. 83, 603-630.
19. Winholtz, R. A. & Cohen J. B. (1988). Aust. J. Phys. 41, 189-199.