Fracture of low-k dielectric films and interfaces

AIP Conference Proceedings

Volumn 817, Issue , 2006, Pages 83-91

  Scherban, T ^a   Xu, G ^a   Merrill, C ^a   Litteken, C ^a   Sun, B ^a  

^a INTEL CORPORATION   (United States)

Author keywords

Four point bending; Interfacial adhesion; Low k films

Indexed keywords

EID: 33751255076     PISSN: 0094243X     EISSN: 15517616     Source Type: Conference Proceeding    
DOI: 10.1063/1.2173535     Document Type: Conference Paper

References (16)

1. C.H. Jan, J. Bielefeld, M. Buehler, V. Chikamane, K. Fischer, T. Hepburn, A. Jain, J. Jeong, T. Kielty, S. Kook, T. Marieb, B. Miner, P. Nguyen, A. Schmidtz, M. Nashner, T. Scherban, B. Schroeder, P.-H. Wang, R. Wu, J. Xu, K. Zawadzki, S. Thompson and M. Bohr, IEEE IITC Proceedings (2004), 205-207.
2. B. R. Lawn, in Fracture of Brittle Solids. 2nd Ed. (1993).
3. Q. Ma, J. Materials Research, 12 (1997) 840.
4. G. Xu, J. He, E. Andideh, J. Bielefeld and T. Scherban, IEEE IITC Proceedings (2002), 57-59.
5. T. A. Michalske, S. W. Freiman, "A Molecular Interpretation of Stress Corrosion in Silica", Nature, 295, 511-512 (1982).
6. E. Andideh, M. Lerner, G. Palmrose, S. El-Mansy, T. Scherban, G. Xu and J. Blaine, J. Vac. Sci. Technol. B (22) 1 (2004), 196-201.
7. J. Rim, F. Shi, D. Lee, R. Dauskardt, T. Scherban, F. Ohta, K. Abe and S. Jain, in preparation.
8. G. Kloster, T. Scherban, G. Xu, J. Blaine and B. Sun, IEEE IITC Proceedings, 257 (2002).
9. C. Jan, B. Schroeder, T. Scherban, A. Schafer and Y. Zhou, patent pending.
10. S. M. Wiederhorn, "Influence of Water Vapor on Crack Propagation in Soda -Lime Glass", J. Amer. Ceram. Soc., 50, 407-414 (1967).
11. C.K. Hu, R. Rosenberg and K.Y. Lee, Appl Phys. Lett. 74, 2945 (1999).
12. Y. Zhou, T. Scherban, G. Xu, J. He, B. Miner, C.-H. Jan, A. Ott, J. O'Loughlin, D. Ingerly and J. Leu, AMC Proceedings., San Diego, (2004).
13. M.W. Lane, E.G. Linger, and J.R. Lloyd, J. Appl. Phys, 93 1417 (2003).
14. C. Litteken, R. Dauskardt, T. Scherban, G. Xu, J. Leu, D. Gracias and B. Sun, IEEE IITC Proceedings (2003), 168-170.
15. D. Gan, S. Yoon, P. Ho, J. Leu, T. Scherban and J. Maiz, AMC Proceedings, Montreal, Canada, 313 (2003).
16. C. Litteken, Ph.D. thesis, Stanford University (2004).