Modeling and analysis of a resonant sensor actuated by a bent beam thermal actuator

Proceedings of the IASTED International Conference on Modelling and Simulation

Volumn 2006, Issue , 2006, Pages 274-279

  Hassanpour, Pezhman A ^a   Cleghorn, William L ^a   Esmailzadeh, Ebrahim ^b   Mills, James K ^a  

^a UNIVERSITY OF TORONTO   (Canada)

^b UNIVERSITY OF ONTARIO INSTITUTE OF TECHNOLOGY   (Canada)

Author keywords

Analytical modeling; Beam vibration; Concentrated mass; MEMS

Indexed keywords

ACTUATORS; GEOMETRY; HEAT TRANSFER; NATURAL FREQUENCIES; STIFFNESS; THERMAL STRESS; VIBRATION MEASUREMENT;

BEAM VIBRATION; CONCENTRATED MASS; THERMAL ACTUATORS;

SENSORS;

EID: 33751252540     PISSN: 10218181     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (11)

1. L. Que, J.S. Park, & Y.B. Gianchandani, Bent-Beam Electrothermal Actuators - Part I: Single Beam and Cascaded Devices, Journal of microelectromechanical systems, 10(2), 2001, 247.
2. L. Que, L. Otradovec, A.D. Oliver, & Y.B. Gianchandani, Pulse and DC operation lifetimes of bent-beam electrothermal actuators, Proceedings of the IEEE Micro Electro Mechanical Systems (MEMS), Interlaken, Switzerland, 2001, 570-573.
3. Y. Lai, J. McDonald, M. Kujath, & T. Hubbard, Force, deflection and power measurements of toggled microthermal actuators, Journal of Micromechanics and Microengineering, 14(1), 2004, 49-56.
4. G.B.Chai & K.H. Low, On the natural frequencies of beams carrying a concentrated mass, Journal of Sound and Vibration, 160(1), 1993, 161-166.
5. S. Naguleswaran, Letters to the editor: Lateral vibration of a uniform Euler-Bernoulli beam carrying a particle at an intermediate point, Journal of Sound and Vibration, 227(1), 1999, 205-214.
6. K.H. Low, Equivalent-center method for quick frequency analysis of beams carrying a concentrated mass, Journal of Computers and Structures, 50(3), 1994, 409-419.
7. N. Lobontiu & E. Garcia, Mechanics of microelectromechanical systems (Kluwer Academic Publishers, 2005).
8. L. Meirovitch, Principles and Techniques of Vibrations (Prentice Hall, 1997).
9. W.T. Thomson, M.D. Dahleh, Theory of Vibration with Applications (Prentice Hall, 1998).
10. I.A. Karnovsky, O.I. Lebed, Free Vibrations of Beams and Frames - Eigenvalues and Eigenfunctions (McGraw Hill, 2004).
11. I.A. Karnovsky, O.I. Lebed, Non-classical Vibrations of Arches and Beams - Eigenvalues and Eigenfunctions (McGraw Hill, 2004).