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Volumn 253, Issue 4, 2006, Pages 1806-1809

On the hydrogen etching mechanism in plasma nitriding of metals

Author keywords

Metal alloys; Plasma nitriding; Surface modification; XPS analysis

Indexed keywords

ETCHING; HYDROGEN; IRON ALLOYS; NITROGEN REMOVAL; PLASMA APPLICATIONS; SURFACE TREATMENT; X RAY PHOTOELECTRON SPECTROSCOPY;

EID: 33751215513     PISSN: 01694332     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.apsusc.2006.03.015     Document Type: Article
Times cited : (26)

References (29)
  • 1
    • 31644434468 scopus 로고
    • Deutchman A.H., Partyka R.J., Lewis C., Spalvins T., and Kovacs W.L. (Eds). Cincinati, OH, USA
    • In: Deutchman A.H., Partyka R.J., Lewis C., Spalvins T., and Kovacs W.L. (Eds). Conference Proceedings of the ASM-Second International Conference. Cincinati, OH, USA (1989) 29
    • (1989) Conference Proceedings of the ASM-Second International Conference , pp. 29
  • 11
    • 0003828439 scopus 로고    scopus 로고
    • Briggs D., and Seah M.P. (Eds), J. Wiley, New York
    • In: Briggs D., and Seah M.P. (Eds). Practical Surface Analysis. second ed. vol. 1 (1996), J. Wiley, New York
    • (1996) Practical Surface Analysis. second ed. , vol.1
  • 13
    • 0030249663 scopus 로고    scopus 로고
    • note
    • The mean free path turns out to be important since the ultimate energy of nitrogen ions arriving at the sample depends on the inelastic scattering of the ions on the way to the substrate. See R. Wei, Surf. Coat. Technol. 83 (1996) 218
  • 26
    • 33751223660 scopus 로고    scopus 로고
    • M.W. Chase Jr., NIST-JANAF Thermochemical Tables, fourth ed., J. Phys. Chem. Ref. Data,, Monograph 9, Parts I and II, 1998.
  • 29
    • 33751221124 scopus 로고    scopus 로고
    • See patent BR200304011-A (2005).


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.